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Etching method
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Patent number 12,142,484
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Issue date Nov 12, 2024
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,615,964
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Issue date Mar 28, 2023
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Tokyo Electron Limited
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Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,551,937
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Issue date Jan 10, 2023
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Tokyo Electron Limited
-
Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,456,180
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Issue date Sep 27, 2022
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Tokyo Electron Limited
-
Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 11,417,530
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Issue date Aug 16, 2022
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Tokyo Electron Limited
-
Takahiro Yokoyama
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H01 - BASIC ELECTRIC ELEMENTS