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Takatoshi ORUI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method
    • Patent number 11,615,964
    • Issue date Mar 28, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 11,600,501
    • Issue date Mar 7, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method
    • Patent number 11,551,937
    • Issue date Jan 10, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 11,456,180
    • Issue date Sep 27, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 11,417,530
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING SYSTEM
    • Publication number 20230377850
    • Publication date Nov 23, 2023
    • TOKYO ELECTRON LIMITED
    • Satoshi OHUCHIDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR ETCHING FOR SEMICONDUCTOR FABRICATION
    • Publication number 20230307242
    • Publication date Sep 28, 2023
    • TOKYO ELECTRON LIMITED
    • Yu-Hao Tsai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
    • Publication number 20230307245
    • Publication date Sep 28, 2023
    • TOKYO ELECTRON LIMITED
    • Koki MUKAIYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20230197458
    • Publication date Jun 22, 2023
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220359167
    • Publication date Nov 10, 2022
    • TOKYO ELECTRON LIMITED
    • Takatoshi ORUI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220199412
    • Publication date Jun 23, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220157610
    • Publication date May 19, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220148884
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Takatoshi ORUI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220093367
    • Publication date Mar 24, 2022
    • TOKYO ELECTRON LIMITED
    • Koki TANAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20210143016
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20210143028
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...