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Takaya Miyano
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Osaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for diagnosing abnormal plasma discharge
Patent number
8,082,124
Issue date
Dec 20, 2011
Ritsumeikan University
Takaya Miyano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Impedance detection apparatus and method of physical variable
Patent number
6,373,264
Issue date
Apr 16, 2002
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Method of detecting end point of process, end point detector, compu...
Patent number
6,327,540
Issue date
Dec 4, 2001
Tokyo Electron Ltd.
Takaya Miyano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitance detection system and method
Patent number
6,326,795
Issue date
Dec 4, 2001
Sumitomo Metal Industries, Ltd.
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Vibration wave detecting method and vibration wave detector
Patent number
6,227,054
Issue date
May 8, 2001
Sumitomo Metal Industries Limited
Shigeru Ando
G01 - MEASURING TESTING
Information
Patent Grant
Vibration wave detecting method and vibration wave detector
Patent number
6,012,334
Issue date
Jan 11, 2000
Sumitomo Metal Industries Limited
Shigeru Ando
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR DIAGNOSING ABNORMAL PLASMA DISCHARGE, ABNORMAL PLASMA DI...
Publication number
20100161278
Publication date
Jun 24, 2010
Takaya Miyano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR