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Saitama-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,891,539
Issue date
Feb 13, 2018
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,823,588
Issue date
Nov 21, 2017
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,429,851
Issue date
Aug 30, 2016
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,360,763
Issue date
Jun 7, 2016
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,310,696
Issue date
Apr 12, 2016
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
8,854,601
Issue date
Oct 7, 2014
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20180052398
Publication date
Feb 22, 2018
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20160252825
Publication date
Sep 1, 2016
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20150029476
Publication date
Jan 29, 2015
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20150029482
Publication date
Jan 29, 2015
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20130194560
Publication date
Aug 1, 2013
Nikon Corporation
Yasuhiro OMURA
G02 - OPTICS
Information
Patent Application
Maintenance Method, Exposure Method, Exposure Apparatus, and Method...
Publication number
20120307220
Publication date
Dec 6, 2012
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Publication number
20120002186
Publication date
Jan 5, 2012
NIKON CORPORATION
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT, OPTICAL ELEMENT HOLDING DEVICE, EXPOSURE APPARATUS...
Publication number
20100033700
Publication date
Feb 11, 2010
Takaya Okada
G02 - OPTICS
Information
Patent Application
Projection optical system, exposure apparatus, and exposure method
Publication number
20090046268
Publication date
Feb 19, 2009
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT HOLDING APPARATUS, BARREL, EXPOSURE APPARATUS AND D...
Publication number
20080291555
Publication date
Nov 27, 2008
Takaya OKADA
G02 - OPTICS
Information
Patent Application
Exposure Apparatus, Exposure Method, and Device Manufacturing Method
Publication number
20080192222
Publication date
Aug 14, 2008
Nikon Corporation
Takaya Okada
G02 - OPTICS
Information
Patent Application
Exposure Apparatus and Device Manufacturing Method
Publication number
20080106718
Publication date
May 8, 2008
Nikon Corporation
Takaya Okada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Maintenance Method, Exposure Method, Exposure Apparatus, And Method...
Publication number
20070285634
Publication date
Dec 13, 2007
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY