Takayasu Matsui

Follow

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
- Patent number 11,381,196
- Issue date Jul 5, 2022
- Canon Kabushiki Kaisha
- Takayasu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Driving control apparatus and method, and exposure apparatus
- Patent number 7,852,033
- Issue date Dec 14, 2010
- Canon Kabushiki Kaisha
- Takayasu Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
STAGE DRIVING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUF...
- Publication number 20190288633
- Publication date Sep 19, 2019
- Canon Kabushiki Kaisha
- Takayasu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Driving control apparatus and method, and exposure apparatus
- Publication number 20050219500
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Takayasu Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY