Takayoshi Osakaya

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Kodaira, JP

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Patents Grantslast 30 patents

Information Patent Grant
Projection aligner and method of positioning a wafer
- Patent number 4,298,273
- Issue date Nov 3, 1981
- Hitachi, Ltd.
- Hiroshi Nishizuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY