Takayuki KAJIKAWA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning device and cleaning method
- Patent number 12,343,770
- Issue date Jul 1, 2025
- Ebara Corporation
- Yuki Tanaka
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus for cleaning member, substrate cleaning apparatu...
- Patent number 11,848,216
- Issue date Dec 19, 2023
- Ebara Corporation
- Takayuki Kajikawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20240286245
- Publication date Aug 29, 2024
- EBARA CORPORATION
- Shinji KAJITA
- B08 - CLEANING
Information Patent Application
CLEANING DEVICE AND CLEANING METHOD
- Publication number 20230191460
- Publication date Jun 22, 2023
- EBARA CORPORATION
- Yuki TANAKA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, SUBSTRATE CLEANING APPARATU...
- Publication number 20210305069
- Publication date Sep 30, 2021
- EBARA CORPORATION
- Takayuki KAJIKAWA
- H01 - BASIC ELECTRIC ELEMENTS