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Takayuki KARAKAWA

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  • Sendai City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20230137865
    • Publication date May 4, 2023
    • TOKYO ELECTRON LIMITED
    • Takayuki KARAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD
    • Publication number 20220084811
    • Publication date Mar 17, 2022
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200294787
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD
    • Publication number 20200251326
    • Publication date Aug 6, 2020
    • TOKYO ELECTRON LIMITED
    • Kazumi KUBO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM DEPOSITION METHOD
    • Publication number 20200243330
    • Publication date Jul 30, 2020
    • TOKYO ELECTRON LIMITED
    • Kazumi KUBO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, METHOD OF CLEANING FILM FORMING APPARATUS,...
    • Publication number 20180355479
    • Publication date Dec 13, 2018
    • TOKYO ELECTRON LIMITED
    • Takayuki KARAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180245216
    • Publication date Aug 30, 2018
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180135170
    • Publication date May 17, 2018
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus and Substrate Processing Method
    • Publication number 20180037995
    • Publication date Feb 8, 2018
    • TOKYO ELECTRON LIMITED
    • Takayuki KARAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method and Film Forming Apparatus
    • Publication number 20170271143
    • Publication date Sep 21, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING NITRIDE FILM
    • Publication number 20170218517
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Methd and Film Forming Apparatus
    • Publication number 20170221703
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20170186606
    • Publication date Jun 29, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20160172183
    • Publication date Jun 16, 2016
    • TOKYO ELECTRON LIMITED
    • Toyohiro Kamada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Processing Apparatus and Substrate Processing Method
    • Publication number 20150292087
    • Publication date Oct 15, 2015
    • TOKYO ELECTRON LIMITED
    • Takayuki KARAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING PROCESS AND FILM FORMING APPARATUS
    • Publication number 20150031218
    • Publication date Jan 29, 2015
    • TOKYO ELECTRON LIMITED
    • Takayuki Karakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, SEMICONDUCTOR DEVICE...
    • Publication number 20140357068
    • Publication date Dec 4, 2014
    • TOKYO ELECTRON LIMITED
    • Masahiro Horigome
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING NITRIDE FILM
    • Publication number 20140242814
    • Publication date Aug 28, 2014
    • TOKYO ELECTRON LIMITED
    • Takayuki KARAKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA EVALUATION METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCE...
    • Publication number 20140227458
    • Publication date Aug 14, 2014
    • TOKYO ELECTRON LIMITED
    • Takayuki Karakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...