Takayuki KAWAGISHI

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, device management controller, and r...
- Patent number 11,966,210
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Kazuhide Asai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, method of monitoring abnormality of...
- Patent number 11,782,425
- Issue date Oct 10, 2023
- Kokusai Electric Corporation
- Kazuyoshi Yamamoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, device management controller, and r...
- Patent number 11,237,538
- Issue date Feb 1, 2022
- Kokusai Electric Corporation
- Kazuhide Asai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing in a process chamber for semiconductor manufac...
- Patent number 11,086,304
- Issue date Aug 10, 2021
- Kokusai Electric Corporation
- Kazuhide Asai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and device management controller
- Patent number 10,937,676
- Issue date Mar 2, 2021
- Kokusai Electric Corporation
- Kazuhide Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and non-transitory computer-readable...
- Patent number 10,860,005
- Issue date Dec 8, 2020
- Kokusai Electric Corporation
- Kazuhide Asai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND...
- Publication number 20230223285
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Yuta TACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20220019191
- Publication date Jan 20, 2022
- Kokusai Electric Corporation
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MONITORING ABNORMALITY OF...
- Publication number 20200201305
- Publication date Jun 25, 2020
- Kokusai Electric Corporation
- Kazuyoshi YAMAMOTO
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20200192324
- Publication date Jun 18, 2020
- Kokusai Electric Corporation
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND DEVICE MANAGEMENT CONTROLLER
- Publication number 20190035657
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20180120822
- Publication date May 3, 2018
- Hitachi Kokusai Electric Inc.
- Kazuhide ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS MANAGEMENT CONTROLLER
- Publication number 20170300044
- Publication date Oct 19, 2017
- Hitachi Kokusai Electric Inc.
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
- Publication number 20170285613
- Publication date Oct 5, 2017
- Hitachi Kokusai Electric Inc.
- Kazuhide ASAI
- G05 - CONTROLLING REGULATING

Takayuki KAWAGISHI

Person

Patents Grantslast 30 patents

Substrate processing apparatus, device management controller, and r...

Substrate processing apparatus, method of monitoring abnormality of...

Substrate processing apparatus, device management controller, and r...

Substrate processing in a process chamber for semiconductor manufac...

Substrate processing apparatus and device management controller

Substrate processing apparatus and non-transitory computer-readable...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND...

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MONITORING ABNORMALITY OF...

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...

SUBSTRATE PROCESSING APPARATUS AND DEVICE MANAGEMENT CONTROLLER

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...

SUBSTRATE PROCESSING APPARATUS AND APPARATUS MANAGEMENT CONTROLLER

SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...