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Takayuki Komiya
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for forming a film including Zr, Hf or the like, and method...
Patent number
8,679,978
Issue date
Mar 25, 2014
Tokyo Electron Limited
Takayuki Komiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insulating film forming method and insulating film forming apparatus
Patent number
6,786,974
Issue date
Sep 7, 2004
Tokyo Electron Limited
Takayuki Komiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insulating film forming method and insulating film forming apparatus
Patent number
6,573,191
Issue date
Jun 3, 2003
Tokyo Electron Limited
Takayuki Komiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming multilevel interconnection of semiconductor device
Patent number
5,904,557
Issue date
May 18, 1999
Tokyo Electron Limited
Takayuki Komiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Washing liquid for post-polishing and polishing-cleaning method in...
Patent number
5,830,280
Issue date
Nov 3, 1998
Tokyo Electron Limited
Yoshihide Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240274433
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Tsuyoshi TSUNATORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230295797
Publication date
Sep 21, 2023
Tokyo Electron Limited
Nobuo MATSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20190237326
Publication date
Aug 1, 2019
TOKYO ELECTRON LIMITED
Takayuki KOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20140174363
Publication date
Jun 26, 2014
TOKYO ELECTRON LIMITED
Takayuki KOMIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND METHOD FOR MANUFACT...
Publication number
20120094483
Publication date
Apr 19, 2012
TOKYO ELECTRON LIMITED
Takayuki KOMIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH-PRESSURE PROCESSING APPARATUS
Publication number
20070134602
Publication date
Jun 14, 2007
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum processing apparatus and method of using the same
Publication number
20060174835
Publication date
Aug 10, 2006
Misako Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film deposition method
Publication number
20060121307
Publication date
Jun 8, 2006
TOKYO ELECTRON LIMITED
Koumei Matsuzawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition method
Publication number
20060099348
Publication date
May 11, 2006
TOKYO ELECTRON LIMITED
Masaki Narushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film formation method
Publication number
20060084266
Publication date
Apr 20, 2006
TOKYO ELECTRON LIMITED
Masaki Narushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electroless plating apparatus and electroless plating method
Publication number
20060037858
Publication date
Feb 23, 2006
TOKYO ELECTRON LIMITED
Yoshinori Marumo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition apparatus and a deposition method using medium in a supe...
Publication number
20050158477
Publication date
Jul 21, 2005
TOKYO ELECTRON LIMITED
Vincent Vezin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reducing apparatus and method
Publication number
20050104525
Publication date
May 19, 2005
TOKYO ELECTRON LIMITED
Takayuki Komiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Insulating film forming method and insulating film forming apparatus
Publication number
20030134500
Publication date
Jul 17, 2003
Takayuki Komiya
H01 - BASIC ELECTRIC ELEMENTS