Takayuki Matsumoto

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer robot with substrate cooling
- Patent number 10,265,868
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer robot with chamber and substrate monitoring capa...
- Patent number 9,691,650
- Issue date Jun 27, 2017
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for sealing an opening of a processing chamber
- Patent number 9,458,538
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Floating slit valve for transfer chamber interface
- Patent number 8,877,553
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Slit valve control
- Patent number 8,297,591
- Issue date Oct 30, 2012
- Applied Materials, Inc.
- Takayuki Matsumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Scissor lift transfer robot
- Patent number 8,272,830
- Issue date Sep 25, 2012
- Applied Materials, Inc.
- Shinichi Kurita
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Floating slit valve for transfer chamber interface
- Patent number 7,988,129
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
- Patent number 7,834,994
- Issue date Nov 16, 2010
- Applied Materials, Inc.
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Grant
End effector assembly for supporting a substrate
- Patent number 7,641,247
- Issue date Jan 5, 2010
- Applied Materials, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
- Patent number 7,440,091
- Issue date Oct 21, 2008
- Applied Materials, Inc.
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Grant
Multiple section end effector assembly
- Patent number 7,073,834
- Issue date Jul 11, 2006
- Applied Materials, Inc.
- Takayuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support
- Patent number 6,917,755
- Issue date Jul 12, 2005
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER
- Publication number 20120103989
- Publication date May 3, 2012
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
- Publication number 20110287374
- Publication date Nov 24, 2011
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TRANSFER ROBOT WITH SUBSTRATE COOLING
- Publication number 20110182699
- Publication date Jul 28, 2011
- Applied Materials, Inc.
- SHINICHI KURITA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER ROBOT WITH CHAMBER AND SUBSTRATE MONITORING CAPA...
- Publication number 20110076118
- Publication date Mar 31, 2011
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCISSOR LIFT TRANSFER ROBOT
- Publication number 20100086380
- Publication date Apr 8, 2010
- Applied Materials, Inc.
- Shinichi Kurita
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SLIT VALVE CONTROL
- Publication number 20100051111
- Publication date Mar 4, 2010
- Applied Materials, Inc.
- Takayuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER
- Publication number 20090114153
- Publication date May 7, 2009
- APPLIED MATERIALS, INC.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNME...
- Publication number 20090050270
- Publication date Feb 26, 2009
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Application
FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
- Publication number 20080258091
- Publication date Oct 23, 2008
- APPLIED MATERIALS, INC.
- John M. White
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
CONTROL OF SLIT VALVE DOOR SEAL PRESSURE
- Publication number 20080210307
- Publication date Sep 4, 2008
- Takayuki Matsumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Sensors for dynamically detecting substrate breakage and misalignme...
- Publication number 20060087647
- Publication date Apr 27, 2006
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Application
Multiple section end effector assembly
- Publication number 20050285419
- Publication date Dec 29, 2005
- Takayuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support
- Publication number 20040170407
- Publication date Sep 2, 2004
- APPLIED MATERIALS, INC.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
End effector assembly
- Publication number 20040113444
- Publication date Jun 17, 2004
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS

Takayuki Matsumoto

Person

Patents Grantslast 30 patents

Transfer robot with substrate cooling

Substrate transfer robot with chamber and substrate monitoring capa...

Method and apparatus for sealing an opening of a processing chamber

Floating slit valve for transfer chamber interface

Slit valve control

Scissor lift transfer robot

Floating slit valve for transfer chamber interface

Sensors for dynamically detecting substrate breakage and misalignme...

End effector assembly for supporting a substrate

Sensors for dynamically detecting substrate breakage and misalignme...

Multiple section end effector assembly

Substrate support

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER

FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE

TRANSFER ROBOT WITH SUBSTRATE COOLING

SUBSTRATE TRANSFER ROBOT WITH CHAMBER AND SUBSTRATE MONITORING CAPA...

SCISSOR LIFT TRANSFER ROBOT

SLIT VALVE CONTROL

METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER

SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNME...

FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE

CONTROL OF SLIT VALVE DOOR SEAL PRESSURE

Sensors for dynamically detecting substrate breakage and misalignme...

Multiple section end effector assembly

Substrate support

End effector assembly