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Takayuki Murayama
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Koka-city, JP
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last 30 patents
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Patent Grant
Ion source
Patent number
10,600,608
Issue date
Mar 24, 2020
NISSIN ION EQUIPMENT CO., LTD.
Masakazu Adachi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
WAFER CLAMPING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20250029865
Publication date
Jan 23, 2025
NISSIN ION EQUIPMENT CO., LTD.
Takayuki MURAYAMA
H01 - BASIC ELECTRIC ELEMENTS