Takayuki NAKADA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,123,091
- Issue date Oct 22, 2024
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 12,062,546
- Issue date Aug 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,935,762
- Issue date Mar 19, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus capable of adjusting inner pressure...
- Patent number 11,846,025
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Masamichi Yachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,512,392
- Issue date Nov 29, 2022
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,495,477
- Issue date Nov 8, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,450,536
- Issue date Sep 20, 2022
- Kokusai Electric Corporation
- Daigi Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,222,796
- Issue date Jan 11, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,211,277
- Issue date Dec 28, 2021
- Kokusai Electric Corporation
- Takeshi Ito
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus, and method for manufacturing semico...
- Patent number 11,155,920
- Issue date Oct 26, 2021
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,124,873
- Issue date Sep 21, 2021
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 10,950,457
- Issue date Mar 16, 2021
- Kokusai Electric Corporation
- Hidenari Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 10,811,271
- Issue date Oct 20, 2020
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and method for manufacturing semico...
- Patent number 10,689,758
- Issue date Jun 23, 2020
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,615,061
- Issue date Apr 7, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,550,468
- Issue date Feb 4, 2020
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,529,605
- Issue date Jan 7, 2020
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,508,336
- Issue date Dec 17, 2019
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for semiconductor devices
- Patent number 9,460,945
- Issue date Oct 4, 2016
- Hitachi Kokusai Electric Inc.
- Shigeo Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,851,886
- Issue date Oct 7, 2014
- Hitachi Kokusai Electric, Inc.
- Shinya Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,591,657
- Issue date Nov 26, 2013
- Hitachi Kokusai Electric Inc.
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,529,701
- Issue date Sep 10, 2013
- Hitachi Kokusai Electric Inc.
- Shinya Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,398,771
- Issue date Mar 19, 2013
- Hitachi Kokusai Electric, Inc.
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,076,615
- Issue date Dec 13, 2011
- Hitachi Kokusai Electric, Inc.
- Shinya Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20250004489
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...
- Publication number 20240234187
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240224238
- Publication date Jul 4, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
- Publication number 20240076780
- Publication date Mar 7, 2024
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230332288
- Publication date Oct 19, 2023
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230017917
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20220392783
- Publication date Dec 8, 2022
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20210305067
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210254211
- Publication date Aug 19, 2021
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...
- Publication number 20210159083
- Publication date May 27, 2021
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20210040619
- Publication date Feb 11, 2021
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICO...
- Publication number 20200240019
- Publication date Jul 30, 2020
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200131631
- Publication date Apr 30, 2020
- Kokusai Electric Corporation
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...
- Publication number 20190393045
- Publication date Dec 26, 2019
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190382892
- Publication date Dec 19, 2019
- Kokusai Electric Corporation
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190221453
- Publication date Jul 18, 2019
- Kokusai Electric Corporation
- Takeshi ITO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Substrate Processing Apparatus
- Publication number 20190035654
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190019705
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20180218927
- Publication date Aug 2, 2018
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICO...
- Publication number 20180187307
- Publication date Jul 5, 2018
- Hitachi Kokusai Electric Inc.
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULA...
- Publication number 20180040488
- Publication date Feb 8, 2018
- Hitachi Kokusai Electric Inc.
- Toshiki FUJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170292188
- Publication date Oct 12, 2017
- Hitachi Kokusai Electric Inc.
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...
- Publication number 20170294318
- Publication date Oct 12, 2017
- Hitachi Kokusai Electric Inc.
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170218513
- Publication date Aug 3, 2017
- Hitachi Kokusai Electric Inc.
- Takayuki NAKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170037512
- Publication date Feb 9, 2017
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120083120
- Publication date Apr 5, 2012
- Hitachi Kokusai Electric Inc.
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120051873
- Publication date Mar 1, 2012
- Hitachi Kokusai Electric Inc.
- Koji SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110286819
- Publication date Nov 24, 2011
- Hitachi Kokusai Electric Inc.
- Koji SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100050945
- Publication date Mar 4, 2010
- Hitachi Kokusai Electric Inc.
- Shinya MORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100051597
- Publication date Mar 4, 2010
- Shinya Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takayuki NAKADA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing device, manufacturing method for semiconductor...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus capable of adjusting inner pressure...

Substrate processing apparatus, recording medium, and fluid circula...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, and method for manufacturing semico...

Substrate processing apparatus

Substrate processing device, manufacturing method for semiconductor...

Substrate processing device, manufacturing method for semiconductor...

Substrate processing apparatus, and method for manufacturing semico...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Substrate processing apparatus for semiconductor devices

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...

SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...

SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICO...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICO...

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULA...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...