Takayuki Ohba

Person

Kanagawa-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a dielectric film
- Patent number 7,563,729
- Issue date Jul 21, 2009
- Fujitsu Microelectronics Limited
- Shiqin Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and a manufacturing method thereof
- Patent number 7,279,790
- Issue date Oct 9, 2007
- Fujitsu Limited
- Hideki Kitada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a semiconductor device including the use of...
- Patent number 7,166,516
- Issue date Jan 23, 2007
- Fujitsu Limited
- Masayuki Furuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture method for semiconductor device with patterned film of...
- Patent number 6,998,303
- Issue date Feb 14, 2006
- Fujitsu Limited
- Yoshihiro Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device production method and semiconductor device pro...
- Patent number 6,805,138
- Issue date Oct 19, 2004
- Fujitsu Limited
- Ade Asneil Akbar
- B08 - CLEANING
Information Patent Grant
Semiconductor device production method and semiconductor device pro...
- Patent number 6,664,179
- Issue date Dec 16, 2003
- Fujitsu Limited
- Ade Asneil Akbar
- B08 - CLEANING
Information Patent Grant
Method and apparatus for wiring, wire, and integrated circuit
- Patent number 6,355,545
- Issue date Mar 12, 2002
- Semiconductor Leading Edge Technologies, Inc.
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum treatment apparatus and a method for manufacturing semicondu...
- Patent number RE36925
- Issue date Oct 31, 2000
- Tokyo Electron Kabushiki Kaisha
- Takayuki Ohba
- 134 - Cleaning and liquid contact with solids
Information Patent Grant
Vacuum treatment apparatus and a cleaning method therefor
- Patent number 5,522,412
- Issue date Jun 4, 1996
- Tokyo Electron Kabushiki Kaisha
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for deposition of a refractory metal nitride and method for...
- Patent number 5,393,565
- Issue date Feb 28, 1995
- Fujitsu Limited
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition system
- Patent number 5,264,038
- Issue date Nov 23, 1993
- Fujitsu Limited
- Tatsushi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 5,232,872
- Issue date Aug 3, 1993
- Fujitsu Limited
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming wiring of a semiconductor device
- Patent number 5,066,612
- Issue date Nov 19, 1991
- Fujitsu Limited
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selectively forming a silicon-containing metal layer
- Patent number 4,902,645
- Issue date Feb 20, 1990
- Fujitsu Limited
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selectively depositing tungsten upon a semiconductor subs...
- Patent number 4,804,560
- Issue date Feb 14, 1989
- Fujitsu Limited
- Yoshimi Shioya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PRODUCING SEMICONDUCTOR DEVICE
- Publication number 20130344655
- Publication date Dec 26, 2013
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a semiconductor device including the use of...
- Publication number 20070072381
- Publication date Mar 29, 2007
- FUJITSU LIMITED
- Masayuki Furuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a dielectric film
- Publication number 20050282400
- Publication date Dec 22, 2005
- FUJITSU LIMITED
- Shiqin Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device fabrication method
- Publication number 20040132257
- Publication date Jul 8, 2004
- Masayuki Furuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacture method for semiconductor device with patterned film of...
- Publication number 20040038555
- Publication date Feb 26, 2004
- FUJITSU LIMITED
- Yoshihiro Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device production method and semiconductor device pro...
- Publication number 20040029381
- Publication date Feb 12, 2004
- FUJITSU LIMITED
- Ade Asneil Akbar
- B08 - CLEANING
Information Patent Application
Semiconductor device production method and semiconductor device pro...
- Publication number 20030136423
- Publication date Jul 24, 2003
- FUJITSU LIMITED
- Ade Asneil Akbar
- B08 - CLEANING
Information Patent Application
Semiconductor device and a manufacturing method thereof
- Publication number 20030042610
- Publication date Mar 6, 2003
- Fujitsu Limited,
- Hideki Kitada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for wiring, wire, and integrated circuit
- Publication number 20020022365
- Publication date Feb 21, 2002
- Takayuki Ohba
- H01 - BASIC ELECTRIC ELEMENTS

Takayuki Ohba

Person

Patents Grantslast 30 patents

Method of forming a dielectric film

Semiconductor device and a manufacturing method thereof

Method for fabricating a semiconductor device including the use of...

Manufacture method for semiconductor device with patterned film of...

Semiconductor device production method and semiconductor device pro...

Semiconductor device production method and semiconductor device pro...

Method and apparatus for wiring, wire, and integrated circuit

Vacuum treatment apparatus and a method for manufacturing semicondu...

Vacuum treatment apparatus and a cleaning method therefor

Method for deposition of a refractory metal nitride and method for...

Chemical vapor deposition system

Method for manufacturing semiconductor device

Method of forming wiring of a semiconductor device

Method of selectively forming a silicon-containing metal layer

Method of selectively depositing tungsten upon a semiconductor subs...

Patents Applicationslast 30 patents

METHOD OF PRODUCING SEMICONDUCTOR DEVICE

Method for fabricating a semiconductor device including the use of...

Method of forming a dielectric film

Semiconductor device fabrication method

Manufacture method for semiconductor device with patterned film of...

Semiconductor device production method and semiconductor device pro...

Semiconductor device production method and semiconductor device pro...

Semiconductor device and a manufacturing method thereof

Method and apparatus for wiring, wire, and integrated circuit