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Takayuki Sekine

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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method and apparatus
    • Patent number 9,263,283
    • Issue date Feb 16, 2016
    • Tokyo Electron Limited
    • Takayuki Sekine
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD AND APPARATUS
    • Publication number 20140302684
    • Publication date Oct 9, 2014
    • TOKYO ELECTRON LIMITED
    • Takayuki Sekine
    • H01 - BASIC ELECTRIC ELEMENTS