Takayuki Suzuki

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of performing maintenance on substrate processing apparatus
- Patent number 12,315,709
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,867,777
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT DEVICE AND ETCHING METHOD
- Publication number 20250226183
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Natsumi TORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PERFORMING MAINTENANCE ON SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20240339307
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Yuya MINOURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTION METHOD AND INFORMATION PROCESSING APPARATUS
- Publication number 20230298867
- Publication date Sep 21, 2023
- TOKYO ELECTRON LIMITED
- Keita YAEGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND ETCHING METHOD
- Publication number 20210343503
- Publication date Nov 4, 2021
- TOKYO ELECTRON LIMITED
- Natsumi TORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF TRANSFERRING WORKPIECE
- Publication number 20190304824
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Takayuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190279850
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Wataru Takayama
- H01 - BASIC ELECTRIC ELEMENTS