Takayuki Yabe

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mask for multi-column electron beam exposure, and electron beam exp...
- Patent number 8,196,067
- Issue date Jun 5, 2012
- Advantest Corp.
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,911,661
- Issue date Jun 28, 2005
- Advantest Corporation
- Takayuki Yabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus, electron beam method, semiconduct...
- Patent number 6,903,355
- Issue date Jun 7, 2005
- Advantest Corporation
- Hiroshi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-column electron beam lithography apparatus and electron beam...
- Publication number 20110204224
- Publication date Aug 25, 2011
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask for multi-column electron beam exposure, and electron beam exp...
- Publication number 20090311613
- Publication date Dec 17, 2009
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam exposure apparatus, electron beam method, semiconduct...
- Publication number 20040000649
- Publication date Jan 1, 2004
- Advantest Corporation
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam exposure apparatus
- Publication number 20030168616
- Publication date Sep 11, 2003
- Advantest Corporation
- Takayuki Yabe
- B82 - NANO-TECHNOLOGY