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Takayuki YABU
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Oyama-shi, JP
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last 30 patents
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Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,924,954
Issue date
Mar 5, 2024
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,778,721
Issue date
Oct 3, 2023
Gigaphoton Inc.
Yuichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,219,116
Issue date
Jan 4, 2022
Gigaphoton Inc.
Yuta Takashima
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Information
Patent Grant
Laser apparatus and EUV light generation system
Patent number
11,043,784
Issue date
Jun 22, 2021
Gigaphoton Inc.
Tsukasa Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation system, laser beam size contro...
Patent number
10,908,429
Issue date
Feb 2, 2021
Gigaphoton Inc.
Takayuki Yabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target measuring apparatus and extreme ultraviolet light generation...
Patent number
10,869,378
Issue date
Dec 15, 2020
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system
Patent number
10,842,010
Issue date
Nov 17, 2020
Gigaphoton Inc.
Takayuki Yabu
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet (EUV) light generating apparatus and control me...
Patent number
10,609,803
Issue date
Mar 31, 2020
Gigaphoton Inc.
Yuichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,531,550
Issue date
Jan 7, 2020
Gigaphoton Inc.
Takayuki Yabu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generating apparatus
Patent number
10,531,551
Issue date
Jan 7, 2020
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,303,061
Issue date
May 28, 2019
Gigaphoton Inc.
Yuichi Nishimura
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet detector and extreme ultraviolet light generating apparatus
Patent number
10,271,414
Issue date
Apr 23, 2019
Gigaphoton Inc.
Kouichi Satou
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Information
Patent Grant
Extreme ultraviolet light generating apparatus and control method f...
Patent number
10,251,254
Issue date
Apr 2, 2019
Gigaphoton Inc.
Yuichi Nishimura
G01 - MEASURING TESTING
Information
Patent Grant
Target supply device and extreme ultraviolet light generating device
Patent number
10,225,917
Issue date
Mar 5, 2019
Gigaphoton Inc.
Takahisa Fujimaki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating apparatus
Patent number
10,225,918
Issue date
Mar 5, 2019
Gigaphoton Inc.
Yuichi Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generating device
Patent number
10,191,381
Issue date
Jan 29, 2019
Gigaphoton Inc.
Takayuki Yabu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme UV light generator
Patent number
10,172,224
Issue date
Jan 1, 2019
Gigaphoton Inc.
Takayuki Yabu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target image-capture device, extreme-ultraviolet-light generation d...
Patent number
10,141,186
Issue date
Nov 27, 2018
Gigaphoton Inc.
Hirokazu Hosoda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating apparatus
Patent number
10,102,938
Issue date
Oct 16, 2018
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generating system
Patent number
10,085,334
Issue date
Sep 25, 2018
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating apparatus and method for gener...
Patent number
10,054,861
Issue date
Aug 21, 2018
Gigaphoton Inc.
Takayuki Yabu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and method of generatin...
Patent number
10,057,972
Issue date
Aug 21, 2018
Gigaphoton Inc.
Yoshifumi Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme UV light generation apparatus and method
Patent number
9,949,354
Issue date
Apr 17, 2018
Gigaphoton Inc.
Takashi Saito
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
9,686,845
Issue date
Jun 20, 2017
Gigaphoton Inc.
Toru Suzuki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus with a gas supply to...
Patent number
9,661,730
Issue date
May 23, 2017
Gigaphoton, Inc.
Atsushi Ueda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser unit and extreme ultraviolet light generating system
Patent number
9,647,406
Issue date
May 9, 2017
Gigaphoton Inc.
Takashi Suganuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generating system
Patent number
9,439,276
Issue date
Sep 6, 2016
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target supply device and target supply method
Patent number
9,310,686
Issue date
Apr 12, 2016
Gigaphoton Inc.
Takayuki Yabu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Target supply apparatus and target supply method
Patent number
9,097,434
Issue date
Aug 4, 2015
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220232690
Publication date
Jul 21, 2022
Gigaphoton Inc.
Yuichi NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220110205
Publication date
Apr 7, 2022
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20220078898
Publication date
Mar 10, 2022
Gigaphoton Inc.
Takayuki YABU
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20210410262
Publication date
Dec 30, 2021
Gigaphoton Inc.
Yuta TAKASHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20210333718
Publication date
Oct 28, 2021
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, LASER BEAM SIZE CONTRO...
Publication number
20200393687
Publication date
Dec 17, 2020
Gigaphoton Inc.
Takayuki YABU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER APPARATUS AND EUV LIGHT GENERATION SYSTEM
Publication number
20200044407
Publication date
Feb 6, 2020
Gigaphoton Inc.
Tsukasa HORI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET MEASURING APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION...
Publication number
20200037429
Publication date
Jan 30, 2020
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET (EUV) LIGHT GENERATING APPARATUS AND CONTROL ME...
Publication number
20190361361
Publication date
Nov 28, 2019
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190313519
Publication date
Oct 10, 2019
Gigaphoton Inc.
Takayuki YABU
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190289707
Publication date
Sep 19, 2019
Gigaphoton Inc.
Yuichi NISHIMURA
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180352641
Publication date
Dec 6, 2018
Gigaphoton Inc.
Yuichi NISHIMURA
G01 - MEASURING TESTING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS AND CONTROL METHOD F...
Publication number
20180343729
Publication date
Nov 29, 2018
Gigaphoton Inc.
Yuichi NISHIMURA
G01 - MEASURING TESTING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20180284617
Publication date
Oct 4, 2018
Gigaphoton Inc.
Yuichi NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Publication number
20180288863
Publication date
Oct 4, 2018
Gigaphoton Inc.
Takahisa FUJIMAKI
G05 - CONTROLLING REGULATING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180240562
Publication date
Aug 23, 2018
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180235064
Publication date
Aug 16, 2018
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Publication number
20180224746
Publication date
Aug 9, 2018
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20180199422
Publication date
Jul 12, 2018
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20180173102
Publication date
Jun 21, 2018
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DROPLET DETECTOR AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20180007771
Publication date
Jan 4, 2018
Gigaphoton Inc.
Kouichi SATOU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
TARGET IMAGE-CAPTURE DEVICE, EXTREME-ULTRAVIOLET-LIGHT GENERATION D...
Publication number
20170358442
Publication date
Dec 14, 2017
Gigaphoton Inc.
Hirokazu HOSODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS AND METHOD FOR GENER...
Publication number
20170205713
Publication date
Jul 20, 2017
Gigaphoton Inc.
Takayuki YABU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND METHOD OF GENERATIN...
Publication number
20170171955
Publication date
Jun 15, 2017
Gigaphoton Inc.
Yoshifumi UENO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170079126
Publication date
Mar 16, 2017
Gigaphoton Inc.
Toru SUZUKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME UV LIGHT GENERATOR
Publication number
20170064799
Publication date
Mar 2, 2017
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20160285222
Publication date
Sep 29, 2016
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20160255707
Publication date
Sep 1, 2016
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20160066401
Publication date
Mar 3, 2016
Gigaphoton Inc.
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME UV LIGHT GENERATION APPARATUS
Publication number
20160037616
Publication date
Feb 4, 2016
GIGAPHOTON INC.
Takashi SAITO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR