Takeda Yoshifumi

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Nakakubiki-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Resist composition and patterning process
- Patent number 6,136,502
- Issue date Oct 24, 2000
- Shin-Etsu Chemical Co., Ltd.
- Watanabe Satoshi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...