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TAKEFUMI SUZUKI
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HARRISON, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrica...
Patent number
10,643,859
Issue date
May 5, 2020
International Business Machines Corporation
Robert L. Bruce
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnects fabricated by hydrofluorocarbon gas-assisted plasma etch
Patent number
10,121,676
Issue date
Nov 6, 2018
International Business Machines Corporation
Robert L. Bruce
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrica...
Patent number
9,934,984
Issue date
Apr 3, 2018
International Business Machines Corporation
Robert L. Bruce
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HYDROFLUOROCARBON GAS-ASSISTED PLASMA ETCH FOR INTERCONNECT FABRICA...
Publication number
20190013209
Publication date
Jan 10, 2019
International Business Machines Corporation
ROBERT L. BRUCE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROFLUOROCARBON GAS-ASSISTED PLASMA ETCH FOR INTERCONNECT FABRICA...
Publication number
20180122649
Publication date
May 3, 2018
International Business Machines Corporation
ROBERT L. BRUCE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROFLUOROCARBON GAS-ASSISTED PLASMA ETCH FOR INTERCONNECT FABRICA...
Publication number
20170069508
Publication date
Mar 9, 2017
International Business Machines Corporation
ROBERT L. BRUCE
H01 - BASIC ELECTRIC ELEMENTS