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Takeharu Kawabe
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Matsudo-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Rotary type CVD film forming apparatus for mass production
Patent number
7,603,962
Issue date
Oct 20, 2009
Mitsubishi Shoji Plastics Corporation
Kenichi Hama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for cleaning raw material gas introduction tube u...
Patent number
7,189,290
Issue date
Mar 13, 2007
Mitsubishi Shoji Plastics Corporation
Kenichi Hama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method and device for cleaning raw material gas introduction tube u...
Publication number
20050227019
Publication date
Oct 13, 2005
Mitsubishi Shoji Plastics Corporation
Kenichi Hama
B08 - CLEANING
Information
Patent Application
Rotary type cvd film forming apparatus for mass production and meth...
Publication number
20050155553
Publication date
Jul 21, 2005
Mitsubishi Shoji Plastics
Kenichi Hama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...