Takeharu Shichiji

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and method for charged particle bea...
- Patent number 8,026,491
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Takeshi Ogashiwa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Charged particle beam apparatus and method for charged particle bea...
- Publication number 20070284542
- Publication date Dec 13, 2007
- Takeshi Ogashiwa
- G01 - MEASURING TESTING