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Takehiko Arita
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature control medium processing apparatus and temperature con...
Patent number
11,835,278
Issue date
Dec 5, 2023
Tokyo Electron Limited
Hayato Sakai
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,817,334
Issue date
Nov 14, 2023
Tokyo Electron Limited
Haruka Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Valve device
Patent number
11,692,639
Issue date
Jul 4, 2023
Tokyo Electron Limited
Kei Kobayashi
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Grant
Processing apparatus for processing target object
Patent number
11,404,251
Issue date
Aug 2, 2022
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control system including multiple valves and temperatur...
Patent number
11,237,577
Issue date
Feb 1, 2022
Tokyo Electron Limited
Kei Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling system
Patent number
10,907,864
Issue date
Feb 2, 2021
Tokyo Electron Limited
Takehiko Arita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TEMPERATURE CONTROL MEDIUM PROCESSING APPARATUS AND TEMPERATURE CON...
Publication number
20240053073
Publication date
Feb 15, 2024
TOKYO ELECTRON LIMITED
Hayato Sakai
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
TEMPERATURE CONTROL SYSTEM AND SYSTEM OF PROCESSING SUBSTRATE
Publication number
20240038555
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Haruka Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL MEDIUM PROCESSING APPARATUS AND TEMPERATURE CON...
Publication number
20210270508
Publication date
Sep 2, 2021
TOKYO ELECTRON LIMITED
Hayato Sakai
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
VALVE DEVICE
Publication number
20210262583
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Kei Kobayashi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210257235
Publication date
Aug 19, 2021
TOKYO ELECTRON LIMITED
Haruka Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF HEAT MEDIUM AND HEAT MEDIUM CONTROL APPARATUS
Publication number
20200243353
Publication date
Jul 30, 2020
TOKYO ELECTRON LIMITED
Kei Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD
Publication number
20200117223
Publication date
Apr 16, 2020
TOKYO ELECTRON LIMITED
Kei KOBAYASHI
F24 - HEATING RANGES VENTILATING
Information
Patent Application
FLOW RATE CONTROL METHOD, TEMPERATURE CONTROL METHOD, AND PROCESSIN...
Publication number
20190310034
Publication date
Oct 10, 2019
TOKYO ELECTRON LIMITED
Kei KOBAYASHI
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
COOLING SYSTEM
Publication number
20190301812
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Takehiko Arita
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
Publication number
20180218887
Publication date
Aug 2, 2018
TOKYO ELECTRON LIMITED
Takehiko Arita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
Publication number
20180218886
Publication date
Aug 2, 2018
TOKYO ELECTRON LIMITED
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS