Takehiko Iwanaga

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, method of controlling same, and method of manuf...
- Patent number 7,072,027
- Issue date Jul 4, 2006
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus
- Patent number 7,046,336
- Issue date May 16, 2006
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus
- Patent number 6,954,259
- Issue date Oct 11, 2005
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Power monitoring unit, control method therefor, and exposure apparatus
- Patent number 6,909,372
- Issue date Jun 21, 2005
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, method of controlling same, and method of manuf...
- Patent number 6,816,239
- Issue date Nov 9, 2004
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination device, exposure apparatus and exposure method
- Patent number 6,788,391
- Issue date Sep 7, 2004
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microdevice manufacturing apparatus
- Patent number 6,396,562
- Issue date May 28, 2002
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and scanning exposure method usin...
- Patent number 5,920,398
- Issue date Jul 6, 1999
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface inspecting device using bisected multi-mode laser beam and...
- Patent number 5,581,348
- Issue date Dec 3, 1996
- Canon Kabushiki Kaisha
- Seiya Miura
- G01 - MEASURING TESTING
Information Patent Grant
Aligning method and apparatus detecting misalignment using image si...
- Patent number 5,347,118
- Issue date Sep 13, 1994
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MOLD
- Publication number 20150004275
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus
- Publication number 20050248745
- Publication date Nov 10, 2005
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, method of controlling same, and method of manuf...
- Publication number 20050041235
- Publication date Feb 24, 2005
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus
- Publication number 20040160592
- Publication date Aug 19, 2004
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Power monitoring unit, control method therefor, and exposure apparatus
- Publication number 20040056665
- Publication date Mar 25, 2004
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus, method of controlling same, and method of manuf...
- Publication number 20030048425
- Publication date Mar 13, 2003
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination device, exposure apparatus and exposure method
- Publication number 20030007137
- Publication date Jan 9, 2003
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takehiko Iwanaga

Person

Patents Grantslast 30 patents

Exposure apparatus, method of controlling same, and method of manuf...

Scanning exposure apparatus

Scanning exposure apparatus

Power monitoring unit, control method therefor, and exposure apparatus

Exposure apparatus, method of controlling same, and method of manuf...

Illumination device, exposure apparatus and exposure method

Microdevice manufacturing apparatus

Surface position detecting method and scanning exposure method usin...

Surface inspecting device using bisected multi-mode laser beam and...

Aligning method and apparatus detecting misalignment using image si...

Patents Applicationslast 30 patents

MOLD

Scanning exposure apparatus

Exposure apparatus, method of controlling same, and method of manuf...

Scanning exposure apparatus

Power monitoring unit, control method therefor, and exposure apparatus

Exposure apparatus, method of controlling same, and method of manuf...

Illumination device, exposure apparatus and exposure method