Takehiko Katsumata

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Shizuoka, JP

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Patents Applicationslast 30 patents

Information Patent Application
Lithography method of electron beam
- Publication number 20100178611
- Publication date Jul 15, 2010
- NuFlare Technology, Inc.
- Hirohito Anze
- B82 - NANO-TECHNOLOGY
Information Patent Application
FORMING METHOD OF RESIST PATTERN AND WRITING METHOD OF CHARGED PART...
- Publication number 20070243487
- Publication date Oct 18, 2007
- NuFlare Technology, Inc.
- Hirohito Anze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY