Takehiko Komatsu

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Selective etching of low-k dielectrics
- Patent number 6,897,154
- Issue date May 24, 2005
- Terry Leung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced plasma oxide etch using hexafluorobutadiene
- Patent number 6,613,689
- Issue date Sep 2, 2003
- Applied Materials, Inc.
- Jingbao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced plasma etch process using a heavy fluorocarbo...
- Patent number 6,451,703
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Jingbao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide/nitride etching having high selectivity to photoresist
- Patent number 6,362,109
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Yungsang Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Selective etching of low-k dielectrics
- Publication number 20030235993
- Publication date Dec 25, 2003
- APPLIED MATERIALS, INC.
- Terry Leung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetically enhanced plasma oxide etch using hexafluorobutadiene
- Publication number 20020173162
- Publication date Nov 21, 2002
- Jingbao Liu
- H01 - BASIC ELECTRIC ELEMENTS