Takehiko Mayama

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vibration isolation device, arithmetic apparatus, exposure apparatu...
- Patent number 7,686,144
- Issue date Mar 30, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Active vibration suppression apparatus, control method therefor, an...
- Patent number 7,275,627
- Issue date Oct 2, 2007
- Canon Kabushiki Kaisha
- Takehiko Mayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus anti-vibration apparatus, system identification...
- Patent number 7,072,777
- Issue date Jul 4, 2006
- Canon Kabushiki Kaisha
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Active vibration suppression apparatus, control method therefor, an...
- Patent number 7,063,192
- Issue date Jun 20, 2006
- Canon Kabushiki Kaisha
- Takehiko Mayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Oscillation isolator
- Patent number 6,518,721
- Issue date Feb 11, 2003
- Canon Kabushiki Kaisha
- Takehiko Mayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Anti-vibration system in exposure apparatus
- Patent number 6,473,159
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Anti-vibration apparatus, exposure apparatus using the same, device...
- Patent number 6,322,060
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration apparatus and anti-vibration method thereof
- Patent number 6,170,622
- Issue date Jan 9, 2001
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vibration damping apparatus and method
- Patent number 6,155,542
- Issue date Dec 5, 2000
- Canon Kabushiki Kaisha
- Hiroaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration apparatus and method
- Patent number 6,128,552
- Issue date Oct 3, 2000
- Canon Kabushiki Kaisha
- Isao Iwai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Active anti-vibration apparatus
- Patent number 6,021,991
- Issue date Feb 8, 2000
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration system
- Patent number 5,812,958
- Issue date Sep 22, 1998
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatu...
- Publication number 20100004869
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VIBRATION SUPPRESSION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF...
- Publication number 20090224444
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Takehiko Mayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATU...
- Publication number 20080246201
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20080218720
- Publication date Sep 11, 2008
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and semiconductor device manufacturing method
- Publication number 20060017908
- Publication date Jan 26, 2006
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...
- Publication number 20010040324
- Publication date Nov 15, 2001
- FITZPATRICK CELLA HARPER & SCINTO
- TAKEHIKO MAYAMA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Takehiko Mayama

Person

Patents Grantslast 30 patents

Vibration isolation device, arithmetic apparatus, exposure apparatu...

Active vibration suppression apparatus, control method therefor, an...

Exposure apparatus anti-vibration apparatus, system identification...

Active vibration suppression apparatus, control method therefor, an...

Oscillation isolator

Anti-vibration system in exposure apparatus

Anti-vibration apparatus, exposure apparatus using the same, device...

Anti-vibration apparatus and anti-vibration method thereof

Vibration damping apparatus and method

Anti-vibration apparatus and method

Active anti-vibration apparatus

Anti-vibration system

Patents Applicationslast 30 patents

Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatu...

VIBRATION SUPPRESSION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF...

VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATU...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

Exposure apparatus and semiconductor device manufacturing method

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...