Takehiko Orll

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Nirasaki-city, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY ME...
- Publication number 20180182610
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and liquid processing method
- Publication number 20030226577
- Publication date Dec 11, 2003
- Takehiko Orll
- H01 - BASIC ELECTRIC ELEMENTS