Takehiro FUKADA

Follow

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method
- Patent number 11,495,457
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Jun Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method
- Patent number 11,328,901
- Issue date May 10, 2022
- Tokyo Electron Limited
- Shigehiro Miura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL APPARATUS AND CONTROL METHOD FOR FILM FORMING APPARATUS
- Publication number 20220372624
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Yohei MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20210050208
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Jun SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD
- Publication number 20200312621
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20190284691
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATION METHOD, PLASMA PROCESSING METHOD USING THE SAME A...
- Publication number 20180277338
- Publication date Sep 27, 2018
- TOKYO ELECTRON LIMITED
- Takehiro FUKADA
- H01 - BASIC ELECTRIC ELEMENTS