Takehiro Hirai

Person

Ushiki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer observation apparatus and wafer observation method
- Patent number 11,670,528
- Issue date Jun 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device
- Patent number 11,177,111
- Issue date Nov 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Akira Ito
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 11,170,483
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device and defect observation method
- Patent number 11,087,454
- Issue date Aug 10, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer observation device
- Patent number 10,977,786
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation system and defect observation method for semicon...
- Patent number 10,971,325
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,810,733
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device
- Patent number 10,770,260
- Issue date Sep 8, 2020
- Hitachi High-Technologies Corporation
- Yuko Otani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 10,559,074
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect quantification method, defect quantification device, and def...
- Patent number 10,297,021
- Issue date May 21, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation method and sample observation device
- Patent number 10,229,812
- Issue date Mar 12, 2019
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,203,851
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect observation device and defect observation method
- Patent number 10,168,286
- Issue date Jan 1, 2019
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G01 - MEASURING TESTING
Information Patent Grant
Defect image classification apparatus
- Patent number 10,074,511
- Issue date Sep 11, 2018
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,922,414
- Issue date Mar 20, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation system and defect observation method
- Patent number 9,842,723
- Issue date Dec 12, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,811,897
- Issue date Nov 7, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for reviewing a defect and apparatus
- Patent number 9,733,194
- Issue date Aug 15, 2017
- Hitachi High-Technologies Corporation
- Yuko Otani
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle radiation apparatus
- Patent number 9,685,301
- Issue date Jun 20, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect analysis assistance device, program executed by defect analy...
- Patent number 9,582,875
- Issue date Feb 28, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,569,836
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification method, and defect classification system
- Patent number 9,401,015
- Issue date Jul 26, 2016
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for testing defect using SEM
- Patent number 9,390,490
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,342,878
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defect
- Patent number 9,342,879
- Issue date May 17, 2016
- Hitachi Hich-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Region-of-interest determination apparatus, observation tool or ins...
- Patent number 9,335,277
- Issue date May 10, 2016
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and device therefor
- Patent number 9,311,697
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Observation device and observation method
- Patent number 9,305,343
- Issue date Apr 5, 2016
- Hitachi High-Technologies Corporation
- Kenji Nakahira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus that performs image classification...
- Patent number 9,280,814
- Issue date Mar 8, 2016
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,177,757
- Issue date Nov 3, 2015
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Defect Classification Device and Defect Classification Program
- Publication number 20240127421
- Publication date Apr 18, 2024
- Hitachi High-Tech Corporation
- Yohei MINEKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection System and Non-Transitory Computer-Readable Medium
- Publication number 20240127417
- Publication date Apr 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Takehiro HIRAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER OBSERVATION APPARATUS AND WAFER OBSERVATION METHOD
- Publication number 20200411345
- Publication date Dec 31, 2020
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE
- Publication number 20200335300
- Publication date Oct 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira ITO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20200126201
- Publication date Apr 23, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...
- Publication number 20200083017
- Publication date Mar 12, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
- Publication number 20200034957
- Publication date Jan 30, 2020
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER OBSERVATION DEVICE
- Publication number 20190266713
- Publication date Aug 29, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE
- Publication number 20190237296
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Yuko OTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD
- Publication number 20190139210
- Publication date May 9, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G01 - MEASURING TESTING
Information Patent Application
Defect Observation Device and Defect Observation Method
- Publication number 20180266968
- Publication date Sep 20, 2018
- Hitachi High-Technologies Corporation
- Takehiro HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20180240225
- Publication date Aug 23, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...
- Publication number 20180174000
- Publication date Jun 21, 2018
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE
- Publication number 20180019097
- Publication date Jan 18, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT QUANTIFICATION METHOD, DEFECT QUANTIFICATION DEVICE, AND DEF...
- Publication number 20170323435
- Publication date Nov 9, 2017
- Hitachi High-Technologies Corporation
- Yohei MINEKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Image Classification Apparatus
- Publication number 20160358746
- Publication date Dec 8, 2016
- Hitachi High-Technologies Corporation
- Takehiro HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Reviewing Defects
- Publication number 20160211112
- Publication date Jul 21, 2016
- Hitachi High-Technologies Corporation
- Toshiyuki NAKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
- Publication number 20160019682
- Publication date Jan 21, 2016
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR REVIEWING A DEFECT AND APPARATUS
- Publication number 20160018340
- Publication date Jan 21, 2016
- Hitachi High-Technologies Corporation
- Yuko Otani
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20150332445
- Publication date Nov 19, 2015
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Observation Method and Defect Observation Device
- Publication number 20150302568
- Publication date Oct 22, 2015
- Hitachi High-Technologies Corporation
- Takehiro HIRAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged-Particle Radiation Apparatus
- Publication number 20150279614
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD
- Publication number 20150214000
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150170875
- Publication date Jun 18, 2015
- Hitachi High-Technologies Corporation
- Naoma Ban
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...
- Publication number 20150139531
- Publication date May 21, 2015
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150060667
- Publication date Mar 5, 2015
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...
- Publication number 20140331173
- Publication date Nov 6, 2014
- Yohei Minekawa
- G02 - OPTICS
Information Patent Application
OBSERVATION DEVICE AND OBSERVATION METHOD
- Publication number 20140307946
- Publication date Oct 16, 2014
- Kenji Nakahira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and Apparatus for Reviewing Defect
- Publication number 20140219546
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...
- Publication number 20140198975
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G01 - MEASURING TESTING

Takehiro Hirai

Person

Patents Grantslast 30 patents

Wafer observation apparatus and wafer observation method

Defect observation device

Sample observation device and sample observation method

Defect observation device and defect observation method

Wafer observation device

Defect observation system and defect observation method for semicon...

Defect classification apparatus and defect classification method

Defect observation device

Sample observation device and sample observation method

Defect quantification method, defect quantification device, and def...

Sample observation method and sample observation device

Defect classification apparatus and defect classification method

Defect observation device and defect observation method

Defect image classification apparatus

Defect inspection method and defect inspection device

Defect observation system and defect observation method

Defect observation method and defect observation device

Method for reviewing a defect and apparatus

Charged-particle radiation apparatus

Defect analysis assistance device, program executed by defect analy...

Defect observation method and defect observation device

Defect classification method, and defect classification system

Method and device for testing defect using SEM

Charged particle beam apparatus

Method and apparatus for reviewing defect

Region-of-interest determination apparatus, observation tool or ins...

Inspection method and device therefor

Observation device and observation method

Charged particle beam apparatus that performs image classification...

Charged particle beam apparatus

Patents Applicationslast 30 patents

Defect Classification Device and Defect Classification Program

Inspection System and Non-Transitory Computer-Readable Medium

WAFER OBSERVATION APPARATUS AND WAFER OBSERVATION METHOD

DEFECT OBSERVATION DEVICE

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...

DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD

WAFER OBSERVATION DEVICE

DEFECT OBSERVATION DEVICE

DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD

Defect Observation Device and Defect Observation Method

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...

SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE

DEFECT QUANTIFICATION METHOD, DEFECT QUANTIFICATION DEVICE, AND DEF...

Defect Image Classification Apparatus

Method and Apparatus for Reviewing Defects

DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

METHOD FOR REVIEWING A DEFECT AND APPARATUS

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

Defect Observation Method and Defect Observation Device

Charged-Particle Radiation Apparatus

DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD

CHARGED PARTICLE BEAM APPARATUS

DEFECT ANALYSIS ASSISTANCE DEVICE, PROGRAM EXECUTED BY DEFECT ANALY...

CHARGED PARTICLE BEAM APPARATUS

GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...

OBSERVATION DEVICE AND OBSERVATION METHOD

Method and Apparatus for Reviewing Defect

REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INS...