Takehiro Kato

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing device and processing method
- Patent number 10,699,935
- Issue date Jun 30, 2020
- TOKO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and plasma processing system
- Patent number 10,147,633
- Issue date Dec 4, 2018
- Tokyo Electron Limited
- Shinji Himori
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Semiconductor manufacturing device and processing method
- Patent number 9,859,146
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and lid supporting apparatus for the...
- Patent number 7,883,579
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Akira Kodashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240177973
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Koki HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335584
- Publication date Oct 28, 2021
- Masakatsu KASHIWAZAKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND PROCESSING METHOD
- Publication number 20180114717
- Publication date Apr 26, 2018
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND PROCESSING METHOD
- Publication number 20140213055
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20130062016
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Shinji HIMORI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Substrate processing apparatus and lid supporting apparatus for the...
- Publication number 20070131167
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Akira Kodashima
- H01 - BASIC ELECTRIC ELEMENTS