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Takehiro OTSUKA
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus of forming carbon film
Patent number
9,378,944
Issue date
Jun 28, 2016
Tokyo Electron Limited
Tomoyuki Obu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and method of operating the same
Patent number
9,279,183
Issue date
Mar 8, 2016
Tokyo Electron Limited
Atsushi Endo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and method of operating the same
Patent number
8,993,456
Issue date
Mar 31, 2015
Tokyo Electron Limited
Atsushi Endo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS OF FORMING CARBON FILM
Publication number
20140011368
Publication date
Jan 9, 2014
Tomoyuki OBU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
Publication number
20130109196
Publication date
May 2, 2013
TOKYO ELECTRON LIMITED
Atsushi ENDO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
Publication number
20130109195
Publication date
May 2, 2013
TOKYO ELECTRON LIMITED
Atsushi ENDO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...