Takehiro SANO

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Kyoto-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUPPORT DEVICE, SUPPORT METHOD, SUBSTRATE PROCESSING SYSTEM, AND ST...
- Publication number 20240103462
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Takashi IKEUCHI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD AND NO...
- Publication number 20230236048
- Publication date Jul 27, 2023
- SCREEN Holdings Co., Ltd.
- Tetsuya YAMAMOTO
- G01 - MEASURING TESTING