Takehiro Shindo

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling substrate transfer system and the substrate t...
- Patent number 12,211,719
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of delivering substrate, and substrate delivery system
- Patent number 12,183,619
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor manufacturing apparatus and method of controlling rot...
- Patent number 12,094,746
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Ryotaro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting substrate, system for processing substra...
- Patent number 12,009,240
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching method
- Patent number 11,984,340
- Issue date May 14, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for processing substrate and method of transferring subst...
- Patent number 11,961,758
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 11,948,822
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Dongwei Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus, semiconductor manufacturing apparatus, and tra...
- Patent number 11,850,743
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport system and substrate transport method
- Patent number 11,776,831
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extendable device
- Patent number 11,491,639
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer device
- Patent number 11,335,586
- Issue date May 17, 2022
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device
- Patent number 11,075,106
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Hiroshi Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and transfer position correcting method
- Patent number 10,971,385
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Hiroki Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum transfer module and substrate processing apparatus
- Patent number 10,763,139
- Issue date Sep 1, 2020
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,748,796
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device and control method thereof
- Patent number 10,586,729
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Hiroshi Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance robot replacement apparatus and conveyance robot replace...
- Patent number 10,133,266
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Masahiro Dogome
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate conveyance method
- Patent number 9,805,960
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method with a second positioning step
- Patent number 9,589,822
- Issue date Mar 7, 2017
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate collecting method
- Patent number 9,082,798
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bevel/backside polymer removing method and device, substrate proces...
- Patent number 8,821,644
- Issue date Sep 2, 2014
- Tokyo Electron Limited
- Isamu Sakuragi
- B24 - GRINDING POLISHING
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,523,138
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Takehiro Shindo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Foreign matter removal method and storage medium
- Patent number 8,216,382
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Takehiro Shindo
- B08 - CLEANING
Information Patent Grant
Substrate position detection apparatus, and method of adjusting a p...
- Patent number 8,159,653
- Issue date Apr 17, 2012
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate position determining method and substrate position detect...
- Patent number 8,135,486
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,113,487
- Issue date Feb 14, 2012
- Tokyo Electron Limited
- Takehiro Shindo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Transportation apparatus and drive mechanism
- Patent number 7,837,425
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum processing apparatus
- Patent number 7,611,124
- Issue date Nov 3, 2009
- Tokyo Electron Limited
- Takehiro Shindo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Wafer transfer apparatus
- Patent number D562524
- Issue date Feb 19, 2008
- Tokyo Electron Limited
- Tsutomu Hiroki
- D34 - Material or article handling equipment

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE
- Publication number 20250006533
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Wataru MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20240290645
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM
- Publication number 20240222185
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Tatsuru OKAMURA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...
- Publication number 20240222186
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...
- Publication number 20240120225
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD
- Publication number 20240112936
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Mitsuyori SUWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE
- Publication number 20230343624
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
- Publication number 20230282503
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20230166924
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF TEACHING TRANSFER DEVICE
- Publication number 20230095452
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Tomoyuki OSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...
- Publication number 20220365187
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND METHOD OF COOLING ARM
- Publication number 20220340377
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20220336260
- Publication date Oct 20, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20220319889
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPENING/CLOSING APPARATUS AND TRANSPORT CHAMBER
- Publication number 20220301911
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...
- Publication number 20220301921
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220285191
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DELIVERING SUBSTRATE, AND SUBSTRATE DELIVERY SYSTEM
- Publication number 20220199456
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20220193897
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CORRECTION METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20220181178
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD AND SUBSTRATE TRANSFER SYSTEM
- Publication number 20220084862
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM AND THE SUBSTRATE T...
- Publication number 20220068683
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Wataru MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM AND SUBSTRATE TRANSPORT METHOD
- Publication number 20220020622
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE
- Publication number 20210305081
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING METHOD
- Publication number 20210252695
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDABLE DEVICE
- Publication number 20210220989
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF CONTROLLING ROT...
- Publication number 20200251368
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Ryotaro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE
- Publication number 20200161163
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Hiroshi Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TRANSFER POSITION CORRECTING METHOD
- Publication number 20200126828
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Hiroki Oka
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Takehiro Shindo

Person

Patents Grantslast 30 patents

Control method and substrate transfer system

Method of controlling substrate transfer system and the substrate t...

Method of delivering substrate, and substrate delivery system

Semiconductor manufacturing apparatus and method of controlling rot...

Apparatus for transporting substrate, system for processing substra...

Teaching method

Apparatus for processing substrate and method of transferring subst...

Substrate transfer device and substrate processing system

Transport apparatus, semiconductor manufacturing apparatus, and tra...

Substrate transport system and substrate transport method

Extendable device

Transfer device

Transfer device

Substrate processing apparatus and transfer position correcting method

Vacuum transfer module and substrate processing apparatus

Substrate processing apparatus

Transfer device and control method thereof

Conveyance robot replacement apparatus and conveyance robot replace...

Substrate conveyance method

Substrate transfer method with a second positioning step

Substrate collecting method

Bevel/backside polymer removing method and device, substrate proces...

Vacuum processing apparatus

Foreign matter removal method and storage medium

Substrate position detection apparatus, and method of adjusting a p...

Substrate position determining method and substrate position detect...

Vacuum processing apparatus

Transportation apparatus and drive mechanism

Vacuum processing apparatus

Wafer transfer apparatus

Patents Applicationslast 30 patents

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

SUBSTRATE TRANSFER SYSTEM

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...

APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...

SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD

PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...

SUBSTRATE PROCESSING SYSTEM AND METHOD OF TEACHING TRANSFER DEVICE

SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...

SUBSTRATE TRANSFER DEVICE AND METHOD OF COOLING ARM

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

OPENING/CLOSING APPARATUS AND TRANSPORT CHAMBER

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM

METHOD OF DELIVERING SUBSTRATE, AND SUBSTRATE DELIVERY SYSTEM

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

CORRECTION METHOD AND SUBSTRATE TRANSFER APPARATUS

CONTROL METHOD AND SUBSTRATE TRANSFER SYSTEM

METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM AND THE SUBSTRATE T...

SUBSTRATE TRANSPORT SYSTEM AND SUBSTRATE TRANSPORT METHOD

TRANSFER DEVICE

TEACHING METHOD

EXTENDABLE DEVICE

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF CONTROLLING ROT...

TRANSFER DEVICE

SUBSTRATE PROCESSING APPARATUS AND TRANSFER POSITION CORRECTING METHOD