Takehiro TSUNEMORI

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
System and method of two-stepped laser scattering defect inspection
- Patent number 8,339,593
- Issue date Dec 25, 2012
- Sumco Corporation
- Eiji Kamiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SILICON WAFER DEFECT INSPECTION METHOD AND SILICON WAFER DEFECT INS...
- Publication number 20230042102
- Publication date Feb 9, 2023
- SUMCO CORPORATION
- Naoyuki WADA
- G01 - MEASURING TESTING
Information Patent Application
LASER SCATTERING DEFECT INSPECTION SYSTEM AND LASER SCATTERING DEFE...
- Publication number 20100085561
- Publication date Apr 8, 2010
- SUMCO CORPORATION
- Eiji KAMIYAMA
- G01 - MEASURING TESTING