Membership
Tour
Register
Log in
Takehiro Ueda
Follow
Person
Nirasaki-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate support, substrate processing apparatus, and substrate pr...
Patent number
11,929,240
Issue date
Mar 12, 2024
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage and plasma processing apparatus
Patent number
11,923,228
Issue date
Mar 5, 2024
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,756,808
Issue date
Sep 12, 2023
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mounting table and charge neutralization method for target object
Patent number
11,582,854
Issue date
Feb 14, 2023
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maintenance device
Patent number
11,532,467
Issue date
Dec 20, 2022
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support and plasma processing apparatus
Patent number
11,443,925
Issue date
Sep 13, 2022
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and maintenance apparatus
Patent number
11,309,168
Issue date
Apr 19, 2022
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mounting apparatus for object to be processed and processing apparatus
Patent number
11,201,039
Issue date
Dec 14, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support assembly and support assembly assembling method
Patent number
11,201,038
Issue date
Dec 14, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,121,010
Issue date
Sep 14, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support, substrate processing apparatus, substrate proces...
Patent number
11,037,767
Issue date
Jun 15, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas cylinder
Patent number
10,968,925
Issue date
Apr 6, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
9,728,381
Issue date
Aug 8, 2017
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
9,437,402
Issue date
Sep 6, 2016
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
8,904,957
Issue date
Dec 9, 2014
Tokyo Electron Limited
Akihiro Kikuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate mounting table and method for manufacturing same, substra...
Patent number
8,869,376
Issue date
Oct 28, 2014
Tokyo Electron Limited
Takehiro Ueda
B32 - LAYERED PRODUCTS
Information
Patent Grant
Apparatus and method for evaluating a substrate mounting device
Patent number
8,573,836
Issue date
Nov 5, 2013
Tokyo Electron Limited
Yasuharu Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate mounting table and method for manufacturing same, substra...
Patent number
8,491,752
Issue date
Jul 23, 2013
Tokyo Electron Limited
Takehiro Ueda
B32 - LAYERED PRODUCTS
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
8,387,562
Issue date
Mar 5, 2013
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma procesor and plasma processing method
Patent number
8,056,503
Issue date
Nov 15, 2011
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck
Patent number
7,646,581
Issue date
Jan 12, 2010
Sumitomo Osaka Cement Co., Ltd.
Yasuharu Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for suppressing charging of component in vacuum processing c...
Patent number
7,592,261
Issue date
Sep 22, 2009
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Absorption board for an electric chuck used in semiconductor manufa...
Patent number
D553104
Issue date
Oct 16, 2007
Tokyo Electron Limited
Kaoru Oohashi
D13 - Equipment for production, distribution, or transformation of energy
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230197501
Publication date
Jun 22, 2023
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND MAINTENANCE APPARATUS
Publication number
20220216035
Publication date
Jul 7, 2022
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...
Publication number
20220108879
Publication date
Apr 7, 2022
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210358779
Publication date
Nov 18, 2021
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUB...
Publication number
20210335645
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
Publication number
20210280449
Publication date
Sep 9, 2021
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAINTENANCE DEVICE
Publication number
20200402764
Publication date
Dec 24, 2020
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
Publication number
20200365380
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCES...
Publication number
20200185204
Publication date
Jun 11, 2020
TOKYO ELECTRON LIMITED
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOUNTING TABLE AND CHARGE NEUTRALIZATION METHOD FOR TARGET OBJECT
Publication number
20200163193
Publication date
May 21, 2020
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND EXHAUST CONTROL METHOD
Publication number
20190273004
Publication date
Sep 5, 2019
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190252218
Publication date
Aug 15, 2019
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOUNTING APPARATUS FOR OBJECT TO BE PROCESSED AND PROCESSING APPARATUS
Publication number
20190252159
Publication date
Aug 15, 2019
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20190198298
Publication date
Jun 27, 2019
TOKYO ELECTRON LIMITED
Jun HIROSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT ASSEMBLY AND SUPPORT ASSEMBLY ASSEMBLING METHOD
Publication number
20190172688
Publication date
Jun 6, 2019
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180315640
Publication date
Nov 1, 2018
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND MAINTENANCE APPARATUS
Publication number
20180233328
Publication date
Aug 16, 2018
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180190501
Publication date
Jul 5, 2018
TOKYO ELECTRON LIMITED
Takehiro UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
Publication number
20180166259
Publication date
Jun 14, 2018
TOKYO ELECTRON LIMITED
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20150083332
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20150083333
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE MOUNTING TABLE AND METHOD FOR MANUFACTURING SAME, SUBSTRA...
Publication number
20130299083
Publication date
Nov 14, 2013
Takehiro UEDA
B32 - LAYERED PRODUCTS
Information
Patent Application
SUBSTRATE MOUNTING TABLE AND PLASMA ETCHING APPARATUS
Publication number
20130220545
Publication date
Aug 29, 2013
TOKYO ELECTRON LIMITED
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20130174983
Publication date
Jul 11, 2013
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20120006492
Publication date
Jan 12, 2012
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR TESTING A TEMPERATURE MONITORING SUBSTRATE
Publication number
20080212640
Publication date
Sep 4, 2008
TOKYO ELECTRON LIMITED
Yasuharu Sasaki
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MANUFACTURING SUBSTRATE MOUNTING TABLE
Publication number
20080145556
Publication date
Jun 19, 2008
TOKYO ELECTRON LIMITED
Nobuyuki NAGAYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE MOUNTING TABLE AND METHOD FOR MANUFACTURING SAME, SUBSTRA...
Publication number
20080142160
Publication date
Jun 19, 2008
TOKYO ELECTRON LIMITED
Takehiro UEDA
B32 - LAYERED PRODUCTS
Information
Patent Application
MOUNTING DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING...
Publication number
20080106842
Publication date
May 8, 2008
TOKYO ELECTRON LIMITED
Hiroharu ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR EVALUATING A SUBSTRATE MOUNTING DEVICE
Publication number
20080098833
Publication date
May 1, 2008
TOKYO ELECTRON LIMITED
Yasuharu Sasaki
H01 - BASIC ELECTRIC ELEMENTS