Takehito Sato

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Tokyo, JP

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Patents Applicationslast 30 patents

Information Patent Application
Vaporizing device for CVD source materials and CVD apparatus employ...
- Publication number 20010039923
- Publication date Nov 15, 2001
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...