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Patents Grants
last 30 patents
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Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,029,600
Issue date
Jun 8, 2021
Tokyo Ohka Kogyo Co., Ltd.
Takehito Seo
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Patent Grant
Compound, acid generator, resist composition, and method of forming...
Patent number
8,227,169
Issue date
Jul 24, 2012
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY
Patents Applications
last 30 patents
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Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20200081345
Publication date
Mar 12, 2020
Tokyo Ohka Kogyo Co., Ltd.
Takehito SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
COMPOUND, ACID GENERATOR, RESIST COMPOSITION, AND METHOD OF FORMING...
Publication number
20100104973
Publication date
Apr 29, 2010
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY