Takehito WATANABE

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and wear amount measurement method
- Patent number 12,033,838
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Joji Takayoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Learning method, management device, and management program
- Patent number 11,556,853
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Yuki Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,501,976
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND WEAR AMOUNT MEASUREMENT METHOD
- Publication number 20210305027
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Joji TAKAYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210265170
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Seiichi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEARNING METHOD, MANAGEMENT DEVICE, AND MANAGEMENT PROGRAM
- Publication number 20200342357
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yuki KATAOKA
- G06 - COMPUTING CALCULATING COUNTING