Takehito Yagi

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film thickness measurement device and method
- Patent number 8,093,913
- Issue date Jan 10, 2012
- IHI Corporation
- Hidetoshi Takimoto
- G01 - MEASURING TESTING
Information Patent Grant
Illumination optical system and laser processor having the same
- Patent number 6,894,839
- Issue date May 17, 2005
- Ishikawajima-Harima Heavy Industries Co., Ltd.
- Yoshikazu Sugiyama
- G02 - OPTICS
Information Patent Grant
Method and apparatus for laser annealing configurations of a beam
- Patent number 6,890,839
- Issue date May 10, 2005
- Ishikawajima-Harima Heavy Industries Co., Ltd.
- Norihito Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus and method of laser irradiation
- Patent number 6,621,636
- Issue date Sep 16, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
FILM THICKNESS MEASUREMENT DEVICE AND METHOD
- Publication number 20090267620
- Publication date Oct 29, 2009
- Hidetoshi TAKIMOTO
- G01 - MEASURING TESTING
Information Patent Application
Method and device for laser annealing
- Publication number 20030132209
- Publication date Jul 17, 2003
- Norihito Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Illumination optical system and laser processor having the same
- Publication number 20020163730
- Publication date Nov 7, 2002
- Yoshikazu Sugiyama
- G02 - OPTICS
Information Patent Application
Laser irradiation apparatus and method of laser irradiation
- Publication number 20020080497
- Publication date Jun 27, 2002
- Semiconductor Energy Laboratory Co., Ltd
- Koichiro Tanaka
- G02 - OPTICS