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Takeki KOGAWA
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,573,540
Issue date
Feb 25, 2020
Shibaura Mechatronics Corporation
Nobuo Kobayashi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170287744
Publication date
Oct 5, 2017
SHIBAURA MECHATRONICS CORPORATION
Nobuo KOBAYASHI
G02 - OPTICS