Takeki Kogawa

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Disc wafer inspecting device and inspecting method
- Patent number 8,107,064
- Issue date Jan 31, 2012
- Shibaura Mechatronics Corporation
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Wafer containing cassette inspection device and method
- Patent number 8,094,923
- Issue date Jan 10, 2012
- Shibaura Mechatronics Corporation
- Yoshinori Hayashi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
DISC WAFER INSPECTING DEVICE AND INSPECTING METHOD
- Publication number 20100177953
- Publication date Jul 15, 2010
- SHIBAURA MECHATRONICS CORPORATION
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Application
WAFER CONTAINING CASSETTE INSPECTION DEVICE AND METHOD
- Publication number 20100074514
- Publication date Mar 25, 2010
- Yoshinori Hayashi
- G06 - COMPUTING CALCULATING COUNTING