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Kurokawa-gun, JP
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last 30 patents
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Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,764,034
Issue date
Sep 19, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240006154
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230326718
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Hikoichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200381215
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS