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Takenobu Matsuo
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Tosu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plating device and plating method
Patent number
7,112,268
Issue date
Sep 26, 2006
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment method using alternating electrical contacts
Patent number
6,953,522
Issue date
Oct 11, 2005
Tokyo Electron Limited
Kyungho Park
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Thermal insulator having a honeycomb structure and heat recycle sys...
Patent number
6,949,719
Issue date
Sep 27, 2005
Tokyo Electron Limited
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Thermal insulator having a honeycomb structure and heat recycle sys...
Patent number
6,756,565
Issue date
Jun 29, 2004
Tokyo Electron Limited
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Plating apparatus and method of manufacturing semiconductor device
Patent number
6,740,164
Issue date
May 25, 2004
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing system
Patent number
6,716,329
Issue date
Apr 6, 2004
Tokyo Electron Limited
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Mist trap mechanism and method for plating apparatus
Patent number
6,641,709
Issue date
Nov 4, 2003
Tokyo Electron Limited
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Liquid treatment system and liquid treatment method
Patent number
6,634,370
Issue date
Oct 21, 2003
Tokyo Electron Limited
Satoshi Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for treating substrate
Patent number
6,403,498
Issue date
Jun 11, 2002
Tokyo Electron Limited
Takenobu Matsuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electronic/electric components used in clean room and substrate tre...
Patent number
6,337,365
Issue date
Jan 8, 2002
Tokyo Electron Limited
Takenobu Matsuo
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Instrument and mounting equipment used in clean room
Patent number
6,077,894
Issue date
Jun 20, 2000
Tokyo Electron Limited
Misako Saito
A43 - FOOTWEAR
Information
Patent Grant
Resist processing method and apparatus
Patent number
5,853,803
Issue date
Dec 29, 1998
Tokyo Electron Limited
Kiyohisa Tateyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist processing apparatus for a rectangular substrate
Patent number
5,718,763
Issue date
Feb 17, 1998
Tokyo Electron Limited
Kiyohisa Tateyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Air cleaning apparatus
Patent number
5,514,196
Issue date
May 7, 1996
Tokyo Electron Limited
Takashi Tanahashi
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Heat treating method and device
Patent number
5,445,521
Issue date
Aug 29, 1995
Tokyo Electron Kabushiki Kaisha
Eiji Yamaguchi
C30 - CRYSTAL GROWTH
Information
Patent Grant
Processing apparatus using gas
Patent number
5,441,076
Issue date
Aug 15, 1995
Tokyo Electron Limited
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Processing apparatus and flow control arrangement therefor
Patent number
5,439,026
Issue date
Aug 8, 1995
Tokyo Electron Limited
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Flow control apparatus
Patent number
5,421,365
Issue date
Jun 6, 1995
Tokyo Electron Limited
Takenobu Matsuo
G05 - CONTROLLING REGULATING
Information
Patent Grant
Heat-treating apparatus
Patent number
5,359,148
Issue date
Oct 25, 1994
Tokyo Electron Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Gas supply system
Patent number
5,307,568
Issue date
May 3, 1994
Tokyo Electron Limited
Takenobu Matsuo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas measuring device and processing apparatus provided with the gas...
Patent number
5,294,280
Issue date
Mar 15, 1994
Tokyo Electron Limited
Tsuyoshi Wakabayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Thermal insulator having a honeycomb structure and heat recycle sys...
Publication number
20040195230
Publication date
Oct 7, 2004
TOKYO ELECTRON LIMITED
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Plating device and plating method
Publication number
20040074763
Publication date
Apr 22, 2004
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Fluid treatment system
Publication number
20040053509
Publication date
Mar 18, 2004
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Mist trap mechanism and method for plating apparatus
Publication number
20030094372
Publication date
May 22, 2003
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and method of manufacturing semiconductor device
Publication number
20020102846
Publication date
Aug 1, 2002
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Thermal insulator having a honeycomb structure and heat recycle sys...
Publication number
20020088610
Publication date
Jul 11, 2002
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Processing apparatus and processing system
Publication number
20010040098
Publication date
Nov 15, 2001
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment equipment and liquid treatment method
Publication number
20010037945
Publication date
Nov 8, 2001
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment system and liquid treatment method
Publication number
20010037764
Publication date
Nov 8, 2001
Satoshi Nakashima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment equipment and liquid treatment method
Publication number
20010037943
Publication date
Nov 8, 2001
Kyungho Park
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR