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Kanagawa, JP
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last 30 patents
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Patent Grant
Sputtering apparatus, film deposition method, and control device
Patent number
10,636,634
Issue date
Apr 28, 2020
Canon Anelva Corporation
Koji Tsunekawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus, film deposition method, and control device
Patent number
9,991,102
Issue date
Jun 5, 2018
Canon Anelva Corporation
Koji Tsunekawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering device and sputtering method
Patent number
8,968,538
Issue date
Mar 3, 2015
Canon Anelva Corporation
Toru Kitada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
Publication number
20180254172
Publication date
Sep 6, 2018
Canon ANELVA Corporation
Koji TSUNEKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
Publication number
20160079045
Publication date
Mar 17, 2016
Canon ANELVA Corporation
Koji TSUNEKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
Publication number
20130105298
Publication date
May 2, 2013
Canon ANELVA Corporation
Koji TSUNEKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING DEVICE AND SPUTTERING METHOD
Publication number
20110223346
Publication date
Sep 15, 2011
Canon ANELVA Corporation
Toru Kitada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...