Takeo Kubota

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,777,424
- Issue date Sep 15, 2020
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,748,289
- Issue date Jun 10, 2014
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,641,480
- Issue date Feb 4, 2014
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,445,360
- Issue date May 21, 2013
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Fabricating method of nonvolatile semiconductor storage apparatus
- Patent number 7,888,139
- Issue date Feb 15, 2011
- Kabushiki Kaisha Toshiba
- Yukiteru Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,744,445
- Issue date Jun 29, 2010
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Grant
Peripheral processing method and method of manufacturing a semicond...
- Patent number 7,638,439
- Issue date Dec 29, 2009
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing liquid
- Patent number 7,354,861
- Issue date Apr 8, 2008
- Kabushiki Kaisha Toshiba
- Kenro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing system
- Patent number 7,172,492
- Issue date Feb 6, 2007
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 7,014,529
- Issue date Mar 21, 2006
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Grant
Method of judging residual film by optical measurement
- Patent number 6,984,532
- Issue date Jan 10, 2006
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting process for manufacturing semiconductor device...
- Patent number 6,743,645
- Issue date Jun 1, 2004
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,429,134
- Issue date Aug 6, 2002
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190267247
- Publication date Aug 29, 2019
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130237033
- Publication date Sep 12, 2013
- EBARA CORPORATION
- Masayuki NAKANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD
- Publication number 20110256811
- Publication date Oct 20, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110217906
- Publication date Sep 8, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110207294
- Publication date Aug 25, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
FABRICATING METHOD OF NONVOLATILE SEMICONDUCTOR STORAGE APPARATUS
- Publication number 20100144062
- Publication date Jun 10, 2010
- Yukiteru MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20090191706
- Publication date Jul 30, 2009
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20090017730
- Publication date Jan 15, 2009
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method for semiconductor wafer and polishing apparatus fo...
- Publication number 20080113590
- Publication date May 15, 2008
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Application
Peripheral processing method and method of manufacturing a semicond...
- Publication number 20070264822
- Publication date Nov 15, 2007
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and semiconductor device manufacturing...
- Publication number 20070000873
- Publication date Jan 4, 2007
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing system
- Publication number 20060068684
- Publication date Mar 30, 2006
- Takeo Kubota
- B24 - GRINDING POLISHING
Information Patent Application
Method of judging residual film by optical measurement
- Publication number 20030197859
- Publication date Oct 23, 2003
- Takeo Kubota
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting process for manufacturing semiconductor device...
- Publication number 20020142498
- Publication date Oct 3, 2002
- Kabushiki Kaisha Toshiba
- Takeo Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Takeo Kubota

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Method for manufacturing semiconductor device

Polishing apparatus and polishing method

Method for manufacturing semiconductor device

Fabricating method of nonvolatile semiconductor storage apparatus

Polishing apparatus and polishing method

Peripheral processing method and method of manufacturing a semicond...

Polishing method and polishing liquid

Polishing method and polishing system

Substrate processing method and substrate processing apparatus

Method of judging residual film by optical measurement

Method of inspecting process for manufacturing semiconductor device...

Method of manufacturing semiconductor device

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

FABRICATING METHOD OF NONVOLATILE SEMICONDUCTOR STORAGE APPARATUS

METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE

Polishing apparatus and polishing method

Polishing method for semiconductor wafer and polishing apparatus fo...

Peripheral processing method and method of manufacturing a semicond...

Substrate processing method and semiconductor device manufacturing...

Polishing method and polishing system

Method of judging residual film by optical measurement

Method of inspecting process for manufacturing semiconductor device...