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Takeo Okamoto
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treating apparatus
Patent number
6,893,171
Issue date
May 17, 2005
Dainippon Screen Mfg. Co., Ltd.
Yoshiteru Fukutomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of and device for transporting semiconductor substrate in se...
Patent number
5,436,848
Issue date
Jul 25, 1995
Dainippon Screen Mfg. Co., Ltd.
Masami Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport apparatus
Patent number
5,359,785
Issue date
Nov 1, 1994
Dainippon Screen Mfg. Co., Ltd.
Yoshiteru Fukutomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interface apparatus for transporting substrates between substrate p...
Patent number
5,308,210
Issue date
May 3, 1994
Dainippon Screen Mfg. Co., Ltd.
Masami Ohtani
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Substrate treating apparatus
Publication number
20030213431
Publication date
Nov 20, 2003
Dainippon Screen Mfg. Co., Ltd.
Yoshiteru Fukutomi
H01 - BASIC ELECTRIC ELEMENTS