Takeo SAITO

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Nirasaki-Shi, Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection device and maintenance method for same
- Patent number 11,226,366
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Yutaka Akaike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 10,823,778
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM
- Publication number 20190041454
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Shuji AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION DEVICE AND MAINTENANCE METHOD FOR SAME
- Publication number 20180364300
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Yutaka AKAIKE
- G01 - MEASURING TESTING