Takeo Sato

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Lighting assembly, exposure apparatus and exposure method employing...
- Patent number 5,748,288
- Issue date May 5, 1998
- Matsushita Electric Industrial Co., Ltd.
- Hiroyuki Nagano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting focus position of object from variable gray lev...
- Patent number 5,621,822
- Issue date Apr 15, 1997
- Matsushita Electric Industrial Co., Ltd.
- Noriaki Yukawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Reflective alignment position signal producing apparatus
- Patent number 5,231,467
- Issue date Jul 27, 1993
- Matsushita Electric Industrial Co., Ltd.
- Hiroyuki Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system
- Patent number 5,227,838
- Issue date Jul 13, 1993
- Matsushita Electric Industrial Co., Ltd.
- Yoshito Nakanishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact reticle/wafer alignment system
- Patent number 5,194,744
- Issue date Mar 16, 1993
- Matsushita Electric Industrial Co., Ltd.
- Shinichiro Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical alignment detection apparatus
- Patent number 5,155,557
- Issue date Oct 13, 1992
- Matsushita Electric Industrial Co., Ltd.
- Toshiyuki Iwazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for evaluating a lens
- Patent number 5,062,705
- Issue date Nov 5, 1991
- Matsushita Electric Industrial Co., Ltd.
- Takeo Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position signal producing apparatus for water alignment
- Patent number 5,053,628
- Issue date Oct 1, 1991
- Matsushita Electric Industrial Co., Ltd.
- Masaki Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus including three beams and three gratings
- Patent number 5,025,168
- Issue date Jun 18, 1991
- Matsushita Electric Industrial Co., Ltd.
- Shinichiro Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical wavelength convertical apparatus
- Patent number 5,005,938
- Issue date Apr 9, 1991
- Matsushita Electric Industry Co., Ltd.
- Tatsuo Itoh
- G02 - OPTICS
Information Patent Grant
Optical projection system
- Patent number 4,948,238
- Issue date Aug 14, 1990
- Matsushita Electric Industrial Co., Ltd.
- Nobuhiro Araki
- G02 - OPTICS
Information Patent Grant
Apparatus for controlling relation in position between a photomask...
- Patent number 4,870,289
- Issue date Sep 26, 1989
- Matsushita Electric Industrial Co., Ltd.
- Takeo Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system for use in precise copy
- Patent number 4,861,148
- Issue date Aug 29, 1989
- Matsushita Electric Industrial Co., Inc.
- Takeo Sato
- G02 - OPTICS
Information Patent Grant
Scanning type projection exposure system
- Patent number 4,844,568
- Issue date Jul 4, 1989
- Matsushita Electric Industrial Co., Ltd.
- Masaki Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrical discharge machining apparatus for forming minute holes i...
- Patent number 4,771,157
- Issue date Sep 13, 1988
- Matsushita Electric Industrial Co., Ltd.
- Takeo Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Projection optical system
- Patent number 4,757,354
- Issue date Jul 12, 1988
- Matsushita Electrical Industrial Co., Ltd.
- Takeo Sato
- G02 - OPTICS
Information Patent Grant
Electrical discharge machining electrode for forming minute holes i...
- Patent number 4,654,498
- Issue date Mar 31, 1987
- Matsushita Electric Industrial Co., Ltd.
- Takeo Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Person

Patents Grantslast 30 patents

Lighting assembly, exposure apparatus and exposure method employing...

Method of detecting focus position of object from variable gray lev...

Reflective alignment position signal producing apparatus

Exposure system

Compact reticle/wafer alignment system

Optical alignment detection apparatus

Apparatus for evaluating a lens

Position signal producing apparatus for water alignment

Alignment apparatus including three beams and three gratings

Optical wavelength convertical apparatus

Optical projection system

Apparatus for controlling relation in position between a photomask...

Projection optical system for use in precise copy

Scanning type projection exposure system

Electrical discharge machining apparatus for forming minute holes i...

Projection optical system

Electrical discharge machining electrode for forming minute holes i...