Takeo SATO

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, semiconductor device manufacturing...
- Patent number 9,543,220
- Issue date Jan 10, 2017
- Hitachi Kokusai Electric Inc.
- Takeo Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230230818
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Tetsuaki Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUC...
- Publication number 20230212753
- Publication date Jul 6, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20140370628
- Publication date Dec 18, 2014
- Hitachi Kokusai Electric Inc.
- Takeo SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND METHO...
- Publication number 20130102159
- Publication date Apr 25, 2013
- Hitachi Kokusai Electric Inc.
- Hiroshi KOTANI
- H01 - BASIC ELECTRIC ELEMENTS