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Takeo Uchino
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
7,112,805
Issue date
Sep 26, 2006
Hitachi High-Technologies Corporation
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
VACUUM PROCESSING APPARAUTS
Publication number
20090078372
Publication date
Mar 26, 2009
Takeo Uchino
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Vacuum processing apparatus
Publication number
20070068628
Publication date
Mar 29, 2007
Takeo Uchino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20070023683
Publication date
Feb 1, 2007
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20050218337
Publication date
Oct 6, 2005
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS